Original language | English |
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Qualification | PhD |
Awarding Institution |
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Supervisors/Advisors |
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Award date | 28 Jun 2004 |
Publication status | Published - 2004 |
Keywords
- Nanolithography
- metastable helium atoms
S.J.H. Petra
Research output: PhD Thesis › PhD-Thesis - Research and graduation internal
Original language | English |
---|---|
Qualification | PhD |
Awarding Institution |
|
Supervisors/Advisors |
|
Award date | 28 Jun 2004 |
Publication status | Published - 2004 |